EVG® HERCULES® NIL Integrated UV-NIL Track System is the main processing system for automated SmartNIL® patterning of substrates, including the substrate cleaning, resist coating, baking, imprinting and stamp manufacturing.
WaveOptics' waveguides are designed for scalable, transferable and high-volume manufacturing. No cumbersome embedded structures or scarce materials are involved, so they are simpler and significantly less expensive than reflector based waveguides.
A simple composition – just three elements, two active waveguide lenses for red, green and blue, plus a front cover lens – means master stamp manufacturers can start with a blank glass wafer. The unique grating design is then plasma-etched to the silicon substrate. This forms the tooling for subsequent mass-manufacture.
The use of existing manufacturing processes, technologies and tools means greater assembly line flexibility and reliability too.
EVG® HERCULES® NIL Integrated UV-NIL Track System is the main processing system for automated SmartNIL® patterning of substrates, including the substrate cleaning, resist coating, baking, imprinting and stamp manufacturing.
Goertek is a world-renowned OEM/ODM manufacturer of precision focusing on research and development, production, and sales of smart hardware system products, virtual and augmented reality (VR/AR) products, and precision components. Goertek offer a wide array of solutions including acoustics, sensors, optoelectronics, 3D-system in package modules, micro display optical modules, and more.
Corning is one of the world's leading innovators in materials science, with a more than 165-year track record of life-changing inventions. Corning applies its unparalleled expertise in glass science, ceramic science, and optical physics along with its deep manufacturing and engineering capabilities to develop category-defining products that transform industries and enhance people's lives.
EV Group (EVG) is a leading supplier of equipment and process solutions for the manufacture of semiconductors, microelectromechanical systems (MEMS), compound semiconductors, power devices and nanotechnology devices. Key products include wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems.
