EVG® HERCULES® NIL Integrated UV-NIL Track System is the main processing system for automated SmartNIL® patterning of substrates, including the substrate cleaning, resist coating, baking, imprinting and stamp manufacturing.
WaveOptics' waveguides are designed for scalable, transferable and high-volume manufacturing. No cumbersome embedded structures or scarce materials are involved, so they are simpler and significantly less expensive than reflector based waveguides.
A simple composition – just three elements, two active waveguide lenses for red, green and blue, plus a front cover lens – means master stamp manufacturers can start with a blank silicon wafer. The unique grating design is then plasma-etched to the silicon substrate. This forms the tooling for subsequent mass-manufacture.
The use of existing manufacturing processes, technologies and tools means greater assembly line flexibility and reliability too.
EVG® HERCULES® NIL Integrated UV-NIL Track System is the main processing system for automated SmartNIL® patterning of substrates, including the substrate cleaning, resist coating, baking, imprinting and stamp manufacturing.
